壓力傳感器是工業實踐中常用的一種傳感器,廣泛應用于各種工業自動控制環境,涉及水利水電、鐵路運輸、智能建筑、生產自動控制、航空航天、石油化工、油井、電力、船舶、機床、管道等諸多行業。這里簡單介紹一些常用傳感器的原理和應用,采用硅藍寶石的測量特性作為半導體敏感元件。
Sapphire is composed of single crystal insulator elements, which will not cause hysteresis, fatigue and creep. Sapphire is stronger than silicon, has higher hardness and is not afraid of deformation; Sapphire has very good elasticity and insulation properties (1000
OC), therefore, the semiconductor sensor made of silicon-sapphire is insensitive to temperature changes and has good working characteristics even under high temperature conditions; Sapphire has strong radiation resistance; In addition, the silicon-sapphire semiconductor sensor has no p-n drift, thus fundamentally simplifying the manufacturing process, improving repeatability and ensuring high yield.
采用硅藍寶石半導體敏感元件制成的壓力傳感器和變送器能在惡劣的工作條件下正常工作,可靠性高,精度好,溫度誤差小,性價比高。
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表壓傳感器和變送器由兩塊膜片組成:鈦合金測量膜片和鈦合金接收膜片。印刷有異質外延應變敏感電橋電路的藍寶石薄片焊接在鈦合金測量膜片上。測量的壓力被傳送到接收膜片(接收膜片和測量膜片通過拉桿牢固地連接在一起)。在壓力的作用下,鈦合金接收膜片變形。硅藍寶石傳感器感知到變形后,電橋的輸出會發生變化,變化的幅度與測得的壓力成正比。
傳感器的電路可以保證應變電橋電路的供電,將應變電橋的不平衡信號轉換成統一的電信號輸出(0-5、4-20mA或0-5V)。在絕對壓力傳感器和變送器中,與陶瓷基玻璃焊料相連的藍寶石片起到彈性元件的作用,將測得的壓力轉化為應變片的形變,從而達到壓力測量的目的。